Honghu (Suzhou) Semiconductor Technology Co.，Ltd

VTM Core parts -wafer vaccum transfer module ( Hong Hu self-research )
Honghu vaccum transfer module introduction
R (radial) axis:
Measuring range: 1010mm
Repeatability: ±0.05mm
T (rotation) axis:
Range: Infinite rotation
Repeated positioning accuracy: ±0.003°
Z (vertical) axis: 50mm, 100mm, 150mm
Repeated positioning accuracy: ±0.05mm
Leakage rate: <1*10-9 std.cc/sec-He
Base Vaccum: <5*10-7 vaccum
Particle Perfermence: ISO Level 1
Power Supply: 85 to 265VAC/50HZ, 2.65A/230VAC
Communication: Ethernet Teach Method: Teach Pendant and Robot Studio Software
Operating temperature: 10ºC-40ºC
Storage temperature: -25ºC to 50ºC
Humidity: 50% to 80% (non-condensing)